MICROFLUIDIC DEVICE

Process Introduction:

Microfluidics is a science and technology for processing and manipulating small fluids, often referred to as microfluidic chips, chip laboratories, or micro total analysis systems. In situ chip provides a complete set of microfluidic chip solutions including design, manufacturing, and testing.

Device application:

Microfluidic chips are widely used in fields such as organic synthesis, chemical analysis, clinical diagnosis, and drug screening due to their miniaturization and integration, providing efficient and accurate analysis and detection methods.

Process capability:

1. PDMS devices:

Precision depends on molds, providing high-precision molds such as etched silicon, SU-8, and etched glass.

2. SU-8 device:

The adhesive thickness is 2-400um, the line width ratio is 1:1, and the accuracy error is less than 10%.

3. Silicon channel devices:

The minimum line width is in the range of hundreds of nanometers, the channel has high steepness, the line width accuracy is high, the controllable accuracy is less than 5%, and the aspect ratio is 5:1.

4. Glass channel components:

Etching with IBE within 1um depth, accuracy within 10%, aspect ratio 1:1.

Etching with NLD at a depth of 1-20um, high etching rate and uniformity.

Wet etching is used for depths above 20um, with a depth to width ratio of 2:1 or higher, and laser drilling is allowed for line widths above 200um.