LON MICROSCOPE

The ion microscope has helium, neon and gallium ions. The applications include imaging, milling in nanometer scale, semiconductor integrated circuit repair, and three-dimensional reconstruction. The imaging resolution of helium ion beam can reach 0.5 nm, and the milling resolution is below 10 nm. This instrument is also equipped with platinum, tungsten, PMCPS gas for surface protection  deposition, conductor or insulator deposition.